俄歇电子能谱学

俄歇电子能谱学（Auger electron spectroscopy，简称AES），是一种表面科学和材料科学的分析技术。因此技术主要借由俄歇效应进行分析而命名之。产生于受激发的原子的外层电子跳至低能阶所放出的能量被其他外层电子吸收而使后者逃脱离开原子，这一连串事件称为俄歇效应，而逃脱出来的电子称为俄歇电子。1953年，俄歇电子能谱逐渐开始被实际应用于鉴定样品表面的化学性质及组成的分析^[1][2][3][4]。其特点是俄歇电子来自浅层表面，仅带出表面的资讯，并且其能谱的能量位置固定，容易分析。

氮化铜薄膜派生模式的俄歇光谱

参见

• UPS, 紫外光电子能谱学 (for gases, aka PES)
• PES, 光电子发射光谱学 (for solid surfaces, aka UPS)
• ZEKE, 零电子动能 spectroscopy
• XPS, X射线光电子能谱学

参考资料

1. Thomas A., Carlson. Photoelectron and Auger Spectroscopy. New York: Plenum Press. 1975. ISBN 0-306-33901-3.
2. Briggs, David; Martin P. Seah. Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy. Chichester: John Wiley & Sons. 1983. ISBN 0-471-26279-X.
3. Thompson, Michael; M. D. Baker; A. Christie; J. F. Tyson. Auger Electron Spectroscopy. Chichester: John Wiley & Sons. 1985. ISBN 0-471-04377-X.
4. Davis, L. E. (ed.). Modern Surface Analysis: Metallurgical Applications of Auger Electron Spectroscopy (AES) and X-ray Photoelectron Spectroscopy (XPS). Warrendale: The Metallurgical Society of AIME. 1980. ISBN 0-89520-358-8.

延伸阅读

• An Introduction to Surface Analysis by XPS and AES, J.F.Watts, J.Wolstenholme, published by Wiley & Sons, 2003, Chichester, UK, ISBN 978-0-470-84713-8
• Jenkins, Leslie H.; M. F. Chung. Auger electron energies of the outer shell electrons. Surface Science. September 1970, 22 (2): 479–485. Bibcode:1970SurSc..22..479C. doi:10.1016/0039-6028(70)90099-3.
• Larkins, F. P. Semiempirical Auger-electron energies for elements 10 ≤ Z ≤ 100. Atomic Data and Nuclear Data Tables. October 1977, 20 (4): 311–387. Bibcode:1977ADNDT..20..311L. doi:10.1016/0092-640X(77)90024-9.
• Burhop, E. H. S. Le rendement de fluorescence. Journal de Physique et le Radium. July 1955, 16 (7): 625–629. doi:10.1051/jphysrad:01955001607062500 （法语）.
• Worthington, C. R.; G. Tomlin. The Intensity of Emission of Characteristic X-Radiation. Proceedings of the Physical Society. Series A. May 1956, 69 (5): 401–412. Bibcode:1956PPSA...69..401W. doi:10.1088/0370-1298/69/5/305.
• Paparazzo, E. Comment on 'AES and SAM microanalysis of structure ceramics by thinning and coating the backside.' Yu and Jin. Surface and Interface Analysis. December 2001, 31 (12): 1110–1111. doi:10.1002/sia.1144.
• "Auger Electron Spectroscopy", J. Wolstenholme, published by Momentum Press, LLC, 2015, New York, ISBN 978-1-60650-681-3 (print), 978-1-60650-682-0 (e-book)