Propylene glycol methyl ether acetate

Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA,^[3] by Shell Chemical under the name methyl proxitol acetate,^[4][5] and by Eastman under the name PM Acetate.^[6]

Propylene glycol methyl ether acetate

Names
Preferred IUPAC name 1-Methoxypropan-2-yl acetate
Other names PGMEA; 1-methoxy-2-propanyl acetate; PM Acetate; Propylene glycol monomethyl ether acetate
Identifiers
CAS Number	108-65-6 Y
3D model (JSmol)	Interactive image
ChemSpider	7658
ECHA InfoCard	100.003.277
PubChem CID	7946
UNII	PA7O2U6S2Q Y
CompTox Dashboard (EPA)	DTXSID1026796
InChI InChI=1S/C6H12O3/c1-5(4-8-3)9-6(2)7/h5H,4H2,1-3H3 Key: LLHKCFNBLRBOGN-UHFFFAOYSA-N InChI=1/C6H12O3/c1-5(4-8-3)9-6(2)7/h5H,4H2,1-3H3 Key: LLHKCFNBLRBOGN-UHFFFAOYAD
SMILES CC(COC)OC(=O)C
Properties
Chemical formula	C6H12O3
Molar mass	132.159 g·mol−1
Appearance	Colorless liquid
Density	0.962 g/cm3
Melting point	−67 °C (−89 °F; 206 K)
Boiling point	146 °C (295 °F; 419 K)
Solubility in water	23.0g /100mL H2O（25 °C
log P	0.26[1]
Hazards
GHS labelling:
Hazard statements	H226, H402
NFPA 704 (fire diamond)	1 2 0
Flash point	45 °C (113 °F; 318 K)
Autoignition temperature	333 °C (631 °F; 606 K)
Explosive limits	1.5% - 7%
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). Infobox references

In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.^[7] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,^[8] due to its evaporation into ambient air.