壓電馬達是利用壓電材料在施加電場後形狀改變的原理而製成的馬達。有的壓電馬達利用了逆壓電效應,即材料為了線性或轉動運動而發生聲學的或者超聲的振動。在另一種機制里,單板的延伸被用來產生一系列的伸展和定位,就像毛毛蟲的前進機制一樣。

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