開爾文探針力顯微鏡(Kelvin probe force microscope, KPFM)是一種原子力顯微鏡,於1991年問世[1]。開爾文探針力顯微鏡利用微懸臂感受和放大懸臂上尖細探針與受測樣品原子之間的作用力,從而達到檢測的目的,具有原子級的分辨率。

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In Kelvin probe force microscopy, a conducting cantilever is scanned over a surface at a constant height in order to map the work function of the surface.

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