Electrical optimization of plasma-enhanced chemical vapor deposition chamber cleaning plasmas (PDF). Journal of Vacuum Science and Technology B. 1997, 16 (1):
Rzechowicz; L. R. Pashley; M. J. Francis. De-Gassed Water is a Better Cleaning Agent. The Journal of Physical Chemistry B. 2005, 109 (3): 1231–8. PMID 16851085