Loading AI tools
Found in articles
structure based surface acoustic wave devices », Appl. Phys. Lett. 104, 114101, 2014 (en) Michio Kadota and al., « Resonator Filters Using Shear Horizontal-Type
reactive magnetron sputtered aluminum nitride thin films for film bulk acoustic wave resonator », Thin Solid Films, no 515, 9 avril 2007, p. 4819–4825 (lire